A look inside Imec's 300mm wafer clean room.
A look inside Imec's 300mm wafer clean room.
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Imec shows advanced lithography to reduce CO2 emissions in chip factories

  • Posted byby Dean Takahashi
  • Updated
  • 2 min

Imec has unveiled a new climate-friendly way to produce patterns on chips using lithography and etch for advanced chip factories.

Leuven, Belgium-based Imec said the tech can reduce the carbon dioxide footprint of lithography and etch for advanced technology nodes for chip factories.

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